发明名称 Reflected light measuring method and reflected light measuring apparatus for a microscopic photometric system.
摘要 <p>A method of measuring light reflected by a test sample with a microscopic photometric system. The test sample placed in an in-focus position of an objective is irradiated, and light reflected by the test sample is measured. Stray light generated by microscopic optics including the objective is measured with the test sample placed in an out-of-focus position of the objective. Light actually reflected by the test sample is determined from a difference between the reflected light and the stray light measured. <IMAGE></p>
申请公布号 EP0631105(A2) 申请公布日期 1994.12.28
申请号 EP19940109321 申请日期 1994.06.16
申请人 DAINIPPON SCREEN MFG. CO., LTD. 发明人 HORIE, MASAHIRO, C/O DAINIPPON SCREEN MFG. CO.,LTD;FUJIWARA, NARIAKI, C/O DAINIPPON SCREEN MFG. CO.,;KOKUBO, MASAHIKO, C/O DAINIPPON SCREEN MFG. CO.,
分类号 G01B9/04;G01B11/00;G01B11/02;G01B11/06;G02B21/00;(IPC1-7):G01B11/06 主分类号 G01B9/04
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