发明名称 |
Turbo-pumped scanning electron microscope |
摘要 |
A scanning electron microscope with an effective vacuum evacuation system and vacuum pump mounting system is disclosed. A manifold having a sufficiently large gas conductance is connected to a gun assembly and to a specimen chamber. A vacuum pump is connected to the manifold for evacuating the gun assembly, specimen chamber and a beam tube. The vacuum pump mounting includes a cylindrical sleeve extending between the vacuum pump and the scanning electron microscope housing with a pair of radial O-rings sealing between the cylindrical sleeve, housing and vacuum pump.
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申请公布号 |
US5376799(A) |
申请公布日期 |
1994.12.27 |
申请号 |
US19930054163 |
申请日期 |
1993.04.26 |
申请人 |
RJ LEE GROUP, INC. |
发明人 |
SCHAMBER, FREDERICK H.;SCHWERER, FRED C.;BEEBE, ALBERT H.;LEE, RICHARD J. |
分类号 |
H01J37/18;(IPC1-7):H01J37/16 |
主分类号 |
H01J37/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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