| 发明名称 |
Reflecting diffraction grating and device, such as encoder or the like, using the same |
| 摘要 |
A reflecting diffraction grating is formed by depositing a metal in vacuum on a blazed diffraction grating having a cross section of regular projections and recesses to provide a metal reflecting film, and forming an SiO protective film on the reflecting film by vacuum deposition.
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| 申请公布号 |
US5377044(A) |
申请公布日期 |
1994.12.27 |
| 申请号 |
US19940197556 |
申请日期 |
1994.02.17 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
TOMONO, HARUO;MATSUO, YUJI |
| 分类号 |
G01D5/38;G02B5/18;(IPC1-7):G02B1/10;G02B27/44 |
主分类号 |
G01D5/38 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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