发明名称 |
Method of improving or producing oxide superconductor |
摘要 |
Herein is disclosed a method of improving or producing an oxide superconductor. An oxide superconductor or starting material of oxide superconductor as an object material is irradiated with active oxygen species. The irradiation process is carried out while keeping the object material at a temperature at which the object material is effectively oxidized with the active oxygen species. The active oxygen species are formed on the inside or in the peripheral portion of a nonequilibrium or equilibrium, high-temperature plasma.
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申请公布号 |
US5376628(A) |
申请公布日期 |
1994.12.27 |
申请号 |
US19920845820 |
申请日期 |
1992.03.09 |
申请人 |
ANELVA CORPORATION |
发明人 |
SEKIGUCHI, ATSUSHI;MITO, HIDEO |
分类号 |
C23C16/40;C23C16/452;C23C16/56;H01L39/24;(IPC1-7):B05D3/06 |
主分类号 |
C23C16/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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