| 摘要 |
PURPOSE:To clearly transfer a character, a symbol by providing one mask region of a plurality of masks partly of a region to be emitted with a transmitted light transmitted through the mask disposed above the one mask to a laser light emitting direction, and extending it to a lower side end of an inclining direction of the one mask. CONSTITUTION:The laser marking apparatus comprises a lens system 23 for enlarging, forming and converging a laser light 21 emitted from a light source 2, and a plurality of masks 3 disposed on an optical axis of the light 21. The masks 3 have a mask 3a of an upstream side and a mask 3b of a downstream side. A mask region 31 of the mask 3b of the downstream side is provided partly at an emitting region of the light 21 transmitted through a transmitting region 32 of the mask 3a of the upstream side, and extended to an end side A to become a lower side of the mask 3b of the downstream side in an inclining direction. Thus, a reflected light 21a is not emitted to a package surface of a semiconductor device through the masks 3a, 3b, but only a character, a symbol drawn on the mask can be clearly transferred. |
