发明名称 OPTICAL COMPONENT
摘要 The invention relates to an optical component consisting of transparent thin layers of differing thickness and refractive indices. Such optical components are used, for example, as interference filters and mirrors. Optical components made of layers with gradually changing refractive indices are also known as waveguides or anti-reflective coatings. The invention achieves the aim of using, instead of layers of ordinary materials, another material by means of a component in which the layers consist of porous silicon. The special advantages of porous silicon as a coating material arise not only from the ease and economy of manufacture but also inthe facility for obtaining gradual refractive index transitions. It is therefore very easily possible to make waveguides on a silicon chip.
申请公布号 WO9429757(A1) 申请公布日期 1994.12.22
申请号 WO1994DE00635 申请日期 1994.06.08
申请人 FORSCHUNGSZENTRUM JUELICH GMBH;BERGER, MICHAEL, GOETZ;MUENDER, HERBERT;FROHNHOFF, STEPHAN;THOENISSEN, MARKUS;LUETH, HANS;FORSCHUNGSZENTRUM JUELICH GMBH 发明人 BERGER, MICHAEL, GOETZ;MUENDER, HERBERT;FROHNHOFF, STEPHAN;THOENISSEN, MARKUS;LUETH, HANS;FORSCHUNGSZENTRUM JUELICH GMBH
分类号 G02B5/08;G02B1/10;G02B1/11;G02B5/28;G02B6/12;G02B6/122;H01L31/0216;H01L31/103;H01L33/34;H01L33/44;H01S5/183;H01S5/32 主分类号 G02B5/08
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