| 摘要 |
<p>A residual gas sensor (100), suitable for mounting within a low pressure chamber, includes an array of quadrupoles formed from a plurality of parallel rods (110) mounted in a cantilevered fashion in a glass seal (106). Sixteen parallel rods form an array of nine quadrupoles with adjacent quadrupoles sharing adjacent rods. A filament (176) emitting electrons which ionize gas molecules present in the low pressure chamber (170). These ions enter channels in the center of each quadrupole and are accelerated towards a collector (140) having a surface mounted within each channel of each quadrupole. Voltages are applied to the rods thereby creating an identical electrical field within the channels of each quadrupole of the array. By varying the voltages applied to the rods, the electric field within the channels can be tuned to permit only ions having a specific mass-to-charge ratio to make contact with the collector.</p> |
