发明名称 |
COATING METHOD WITH RESIST FOR COLOR FILTER CONTAINING PIGMENT |
摘要 |
<p>PURPOSE:To form a coating film having a uniform thickness and satisfactory reproducibility at the time of spin coating with a resist for a color filter contg. a pigment as a non-Newtonian fluid having an yield value such as a plastic fluid or a thixotropic fluid. CONSTITUTION:The thixotropy ratio of a resist for a color filter contg. a pigment as a non-Newtonian fluid having an yield value such as a plastic fluid or a thixotropic fluid is regulated to 1.0-1.1 through a static mixer before coating and a substrate on a spin coater is spin-coated with the resist.</p> |
申请公布号 |
JPH06348023(A) |
申请公布日期 |
1994.12.22 |
申请号 |
JP19930156375 |
申请日期 |
1993.06.03 |
申请人 |
NIPPON KAYAKU CO LTD |
发明人 |
KATO YOSHINORI;YAMAZAKI TAKENORI |
分类号 |
B05D1/40;G02B5/20;G03F7/16;H01L21/027;(IPC1-7):G03F7/16 |
主分类号 |
B05D1/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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