发明名称 COATING METHOD WITH RESIST FOR COLOR FILTER CONTAINING PIGMENT
摘要 <p>PURPOSE:To form a coating film having a uniform thickness and satisfactory reproducibility at the time of spin coating with a resist for a color filter contg. a pigment as a non-Newtonian fluid having an yield value such as a plastic fluid or a thixotropic fluid. CONSTITUTION:The thixotropy ratio of a resist for a color filter contg. a pigment as a non-Newtonian fluid having an yield value such as a plastic fluid or a thixotropic fluid is regulated to 1.0-1.1 through a static mixer before coating and a substrate on a spin coater is spin-coated with the resist.</p>
申请公布号 JPH06348023(A) 申请公布日期 1994.12.22
申请号 JP19930156375 申请日期 1993.06.03
申请人 NIPPON KAYAKU CO LTD 发明人 KATO YOSHINORI;YAMAZAKI TAKENORI
分类号 B05D1/40;G02B5/20;G03F7/16;H01L21/027;(IPC1-7):G03F7/16 主分类号 B05D1/40
代理机构 代理人
主权项
地址