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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06349983(A)
申请公布日期
1994.12.22
申请号
JP19930141048
申请日期
1993.06.14
申请人
HITACHI LTD;HITACHI HOKKAI SEMICONDUCTOR LTD
发明人
TAKEBE KENICHI
分类号
H01L23/34;(IPC1-7):H01L23/34
主分类号
H01L23/34
代理机构
代理人
主权项
地址
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