| 摘要 |
A phase change memory device and method of forming a phase change memory device is disclosed. The method includes forming a memory device with a plurality of memory cells, each memory cell having a pillar containing a region of an active material, said method comprising the steps of: depositing at least a thermally insulating base layer on a surface that comprises said pillars; depositing a top layer on top of said base layer, said base layer having a higher resistance against polishing than said top layer; and planarizing a top surface by polishing such that at least the parts of said base layer above said pillars are exposed. The invention further relates to a memory device fabricated by this method.
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