| 摘要 |
<p>An apparatus for releasably holding a workpiece in semiconductor processing systems such as a batch ion implanter which comprises a linkage mechanism mounted onto the backside of a platen for clamping a wafer (2) against a fence (1A) of a supporting means (1) and a pusher means (11) mounted on a wafer lift means (13) for engagement with a lever mechanism (5, 6, 7, 9, 10, 15) for locking and unlocking the device, and sensing any misclamp of the workpiece.</p> |
