发明名称 TREATMENT APPARATUS
摘要 <p>PURPOSE:To equalize the temperature distribution of a treating heat which is supplied from a heating unit to a treated object through a mount and, further, improve the convenience of maintenance of the mount such as cleaning and replacement. CONSTITUTION:A mount 2 is attached to a heating unit 3 so as to be detachable. Further, a tight contact means (attracting trenches 8) which brings the mount 2 into contact with the heating unit 3 tightly is provided. The mount 2 can be attached to and detached from the heating unit 3 by sliding the mount 2 along the upper edge part of a guide member 6 to the directions of arrows A and B with support shafts 4 provided on both the sides of the mount 2. Notches 7 whose number is the same as the number of the support shafts 4 are provided in the upper edge part of the guide member 6. The support shafts 4 fall into the notches 7 to position the mount 2 accurately and make the mount 2 sit on the heating unit 3.</p>
申请公布号 JPH06349775(A) 申请公布日期 1994.12.22
申请号 JP19930163772 申请日期 1993.06.10
申请人 TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK 发明人 TAKAMORI HIDEYUKI;SATO TAKAZO
分类号 B05C9/14;F27D99/00;G03F7/26;H01L21/00;H01L21/027;H01L21/30;H01L21/324;H01L21/683;(IPC1-7):H01L21/30;H01L21/68 主分类号 B05C9/14
代理机构 代理人
主权项
地址