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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06349962(A)
申请公布日期
1994.12.22
申请号
JP19930140341
申请日期
1993.06.11
申请人
HITACHI LTD;HITACHI TOBU SEMICONDUCTOR LTD
发明人
SATO YOSHITO
分类号
H01L23/02;(IPC1-7):H01L23/02
主分类号
H01L23/02
代理机构
代理人
主权项
地址
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