METHOD FOR CORRECTING DEFECT OF STRUCTURAL BODY

摘要

PURPOSE:To provide the method for correcting a structural body by flatly correcting either of a projecting defect or recessed defect flush with a substrate surface. CONSTITUTION:This method for correcting the defect of the structural body which corrects the projecting defect 102 generated in the structural body formed with desired patterns on a substrate 101 includes a stage for forming a first thin film 104 consisting of a material different from the substrate 101 on the substrate 101 around the projecting defect 102 or so as to be approximate to the projecting defect 102, a stage for forming a second thin film 105 on the projecting defect 102 and the first thin film 104 and flattening the front surface thereof, a stage for simultaneously removing the projecting defect 102 and the respective thin films in the upper part thereof and the peripheries thereof by using charged particle ray and a stage for removing the respective thin films remaining in this removing stage.