DEVICE FOR PROBING DIFFERENT TYPE IN SEMICONDUCTOR WAFER,申请号JP19930133738-传众专利搜索

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发明名称	DEVICE FOR PROBING DIFFERENT TYPE IN SEMICONDUCTOR WAFER
摘要
申请公布号	JPH06349903(A)	申请公布日期	1994.12.22
申请号	JP19930133738	申请日期	1993.06.04
申请人	NEC KYUSHU LTD	发明人	NISHIYAMA KAZUNORI
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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