COMPOUND SEMICONDUCTOR SUBSTRATE AND ITS MANUFACTURE,申请号JP19930140229-传众专利搜索

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发明名称	COMPOUND SEMICONDUCTOR SUBSTRATE AND ITS MANUFACTURE
摘要
申请公布号	JPH06349733(A)	申请公布日期	1994.12.22
申请号	JP19930140229	申请日期	1993.06.11
申请人	SUMITOMO METAL IND LTD	发明人	ASAI KOSUKE
分类号	H01L21/20;H01L21/203;(IPC1-7):H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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