A system (99) for inspecting integrated circuit probe cards (45) using a video camera (124) positioned to view probe points on thecard from below. A precision movement stage is used to move the video camera into a known position for viewing the probe points. Analysis of the video image and the stage positions are used to determine the relative positions of the probe points.
申请公布号
WO9429816(A1)
申请公布日期
1994.12.22
申请号
WO1994US06293
申请日期
1994.06.03
申请人
INTEGRATED TECHNOLOGY CORPORATION
发明人
SCHWARTZ, RODNEY, E.;WIRICK, GLENN, M.;ROGERS, GARY, B.