Process for manufacturing tubular microstructures in solid state bodies.

摘要

The invention relates to a process for manufacturing a tubular submicrometer structure under a solid-state surface, which structure consists of chemically bonding of the solid-state atoms to foreign atoms which are introduced under the solid-state surface in the form of stripes by ion implantation or by means of selective deposition processes and are caused to react chemically and form the structure by a subsequent defined heat treatment.