摘要 |
PURPOSE:To recognize the position of each pin accurately by reading each pin tip as a clear image. CONSTITUTION:When ring-shaped light is applied to one surface of a PAG 1 where a plurality of pins 3 are erected, the incidence angle of light at this time is set to an angle where the reflection light at the tip of each pin 3 does not enter an image pick-up device 9. In this state, the image of the PAG l where light is applied is picked up by the image pick-up device 9 and then the position of each pin 3 is recognized according to the light and shade level of the image data obtained by the image pickup. Also, by scattering the light applied to a substrate and each pin 3 with a scattering plate 20, the position of each pin 3 is recognized according to the light and shade level of the image data obtained in this state. |