| 摘要 |
PURPOSE:To form a good-quality wiring pattern excellent in conductivity even on a base material of polymer by using a metallic filmlayer as the deposition starting base material of a metal for a wiring pattern in laser CVD. CONSTITUTION:A metallic film is formed on the surface of a polymer base material for wiring, the base material is introduced into a raw gas atmosphere, the metallic film layer is irradiated with a laser beam in accordance with a wiring pattern, hence a metallic layer for wiring pattern consisting of the decomposition product of the raw gas and consisting of a metal different from the metallic film is selectively deposited on the metallic film, and the part of the metallic film layer unirradiated with the laser beam is selectively removed. Accordingly, a high-quality minute wiring pattern is formed on various polymer base materials, e.g. on the surface of the tip of a catheter. |
