| 摘要 |
PURPOSE:To stably decompose a fluorocarbon-containing gas oxidatively for long time by allowing the fluorocarbon-containing gas to contact with the catalyst consisting of the silicon carbide carrying plutinum at more than specified temp. under the atmosphere in which steam and air coexist. CONSTITUTION:The fluorocarbon-containing gas is allowed to contact with the catalyst consisting of the silicon carbide carrying plutinum at >=300 deg.C under the atmosphere in which steam and air coexist. At that time, the fluorocarbon concn. in the fluorocarbon-containing gas is >=0.1vol.% and the specific surface area of the silicon carbide is >=1m<2>/g. In such a way, the fluorocarbon-containing gas is decomposed oxidatively for long time stably. |
