FORMATION OF THIN DIAMOND FILM,申请号JP19930138143-传众专利搜索

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发明名称	FORMATION OF THIN DIAMOND FILM
摘要
申请公布号	JPH06345592(A)	申请公布日期	1994.12.20
申请号	JP19930138143	申请日期	1993.06.10
申请人	KOBE STEEL LTD	发明人	SAITOU KIMITSUGU;MIYATA KOICHI
分类号	C23C16/27;C30B25/02;C30B29/04;H01L21/205	主分类号	C23C16/27
代理机构		代理人
主权项
地址

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