| 发明名称 |
Method and apparatus for moving a material removal tool with low tool accelerations |
| 摘要 |
A stage 14 supporting a material removal tool 12 is instructed by a controller 16 through interface 18 to accelerate and decelerate the material removal tool 12 within at least one predetermined spatial interval while satisfying the dwell-time required to remove a predetermined amount of material to achieve a desired thickness of the spatial interval.
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| 申请公布号 |
US5375064(A) |
申请公布日期 |
1994.12.20 |
| 申请号 |
US19930162510 |
申请日期 |
1993.12.02 |
| 申请人 |
HUGHES AIRCRAFT COMPANY |
发明人 |
BOLLINGER, LYNN D. |
| 分类号 |
B23Q15/00;B24B49/02;G05B19/416;H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):G06F15/46 |
主分类号 |
B23Q15/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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