| 发明名称 |
Multi-dimensional precision micro-actuator |
| 摘要 |
Mechanically movable microstructure fabricated from a single crystal such as silicon and actuator structures for providing a high degree of controlled, precision motion of nanometer-scale variable impedances.
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| 申请公布号 |
US5375033(A) |
申请公布日期 |
1994.12.20 |
| 申请号 |
US19930002500 |
申请日期 |
1993.01.06 |
| 申请人 |
CORNELL RESEARCH FOUNDATION, INC. |
发明人 |
MACDONALD, NOEL C. |
| 分类号 |
B81C1/00;G01Q60/16;H01H1/00;H01H59/00;H02N1/00;(IPC1-7):H01G5/14 |
主分类号 |
B81C1/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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