发明名称 Locating table apparatus
摘要 A locating table apparatus is provided with a housing, a base member fixed in the housing, a table mounted so as to freely move in a longitudinal direction, driving members located on the base member for supporting and driving the table, an outer cover covering the table, an inner cover formed with a U-shaped groove member for covering the driving members therein, and a sound absorbing member attached to at least one of the inner and outer cover, whereby the noisy sound generated inside the locating table apparatus is attenuated by and absorbed in the sound absorbing member.
申请公布号 US5373751(A) 申请公布日期 1994.12.20
申请号 US19930039727 申请日期 1993.03.30
申请人 NSK LTD. 发明人 KATAHIRA, MASAYUKI
分类号 B23Q1/00;B23Q11/08;F16H25/20;F16H25/24;F16H57/00;H01L21/027;H01L21/30;H01L21/68;(IPC1-7):F16H25/20;G10K11/04 主分类号 B23Q1/00
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