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经营范围
发明名称
Liquid recovery member, exposure apparatus, exposing method, and device fabricating method
摘要
An exposure apparatus comprises a recovery member that recover a liquid. The recovery ability with which the recovery member recovers the liquid differs in accordance with the region of the recovery member.
申请公布号
US2008231824(A1)
申请公布日期
2008.09.25
申请号
US20080149782
申请日期
2008.05.08
申请人
NIKON CORPORATION
发明人
NAGASAKA HIROYUKI
分类号
G03B27/52
主分类号
G03B27/52
代理机构
代理人
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地址
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