Process and apparatus for disposing of fluorocarbons and other fluorine-containing compounds

摘要

Process and apparatus for disposing of fluorocarbon-containing and fluorine-containing compounds by conversion of these compounds in a plasma-chemical process in which the said compounds are converted in the plasma with a solid with addition of e.g. oxygen, steam or hydrogen. The solid can be for example SiO2 which may also be reacted as a wall of the reaction chamber. An additional coating with catalytically active substances and with alkali metal compounds or alkaline earth metal compounds enables an acceleration of reaction and formation of fluorides acceptable for landfill. The apparatus used is plasma reactor which contains the solid and can be operated with a high frequency, low frequency, direct current or microwave discharge.