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摘要
申请公布号
JPH06101306(B2)
申请公布日期
1994.12.12
申请号
JP19870270680
申请日期
1987.10.27
申请人
发明人
分类号
H01J27/16;H01J27/08;H01J27/22;H01J37/08;(IPC1-7):H01J27/08
主分类号
H01J27/16
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