| 摘要 |
An array of electron beam tubes (152, 156, 158) is mounted on a conductive plate (91, 109, 123) for projecting stripe-like electron beam (163, 164, 165) through air onto a substrate (101) beneath the plate. The tubes each have a narrow beam window (51) formed by a very thin low-Z film layer (73), supported by silicon (71) and sealing the tube against ambient pressure. Such windows produce low beam attenuation and allow low extraction voltages to be used, thereby reducing beam energy which would otherwise be lost by penetration through a surface to be treated. The stripe-like output electron beam segments (113, 115) may be formed into a linear beam track so that the entire widthwise extent of a surface, such as a sheet or web (121), may be treated by electron beam irradiation or the beam segments may be formed into any desired composite beam pattern. In another embodiment the stripe-like output beam segments may be arranged in an array to treat a circular circumferential surface, such as a cable.
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