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发明名称
Mikrokapillare mit integrierten chemischen Mikrosensoren und Verfahren zu ihrer Herstellung
摘要
申请公布号
DE4318407(A1)
申请公布日期
1994.12.08
申请号
DE19934318407
申请日期
1993.06.03
申请人
FORSCHUNGSZENTRUM ROSSENDORF EV, 01474 ROSSENDORF, DE
发明人
HOWITZ, STEFFEN, DR., O-8019 DRESDEN, DE;PHAM, MINH TAN, DR., O-8051 DRESDEN, DE;FIEHN, HENDRIK, O-8060 DRESDEN, DE
分类号
G01N27/28;G01N27/414;(IPC1-7):G01N27/414;H01L21/308;H01L21/60;H01L21/58
主分类号
G01N27/28
代理机构
代理人
主权项
地址
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