| 摘要 |
Solid phase welding in electrostatic field of silicon-glass-silicon connections with change of the polarity during welding. The process is performed by one cycle with guarantee of uniform strength of both silicon-glass welded joints due to connection of silicon membranes with electrodes for application of positive potential, and to the side of glass component – clamping electrode for application of negative potential, heating the multilayer connection to the temperature of welding, isothermal holding, successive supply of electrical welding voltage on each of silicon- glass interfaces by switching the positive potential from one silicon membrane to another. |
