METHOD AND APPARATUS FOR GLOW DISCHARGE PLASMA TREATMENT OF POLYMER MATERIALS AT ATMOSPHERIC PRESSURE

摘要

A steady-state glow discharge plasma is generated at one atmosphere of pressure within the volume (S) between a pair of insulated metal plate electrodes (14) spaced up to 5 cm apart and rf energized with an rms potential of 1-5kV at 1-100kHz (20). Space between the electrodes is occupied by air, nitrous oxide, and a noble gas such as helium, neon, argon, etc., or mixtures thereof. The electrodes are charged by an impedance matching network (31) adjusted to produce the most stable, uniform glow discharge. Also, a method for treating a meltblown polymer web, using the aforementioned plasma device, is included.