| 发明名称 |
ADDITION OF OXYGEN TO A GAS MIX FOR USE IN AN EXCIMER LASER |
| 摘要 |
The present invention relates to discovery that oxygen may be used to stabilize the efficiency and performance of an excimer laser. Therefore, oxygen is not a contaminant to be minimized but rather a necessary part of an excimer lasing composition.
|
| 申请公布号 |
WO9428606(A1) |
申请公布日期 |
1994.12.08 |
| 申请号 |
WO1993US07008 |
申请日期 |
1993.07.26 |
| 申请人 |
SPECTRA GASES, INC.;TURNER, BRIAN, ALLAN |
发明人 |
TURNER, BRIAN, ALLAN |
| 分类号 |
H01S3/225;(IPC1-7):H01S3/22 |
主分类号 |
H01S3/225 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
