| 申请人 |
HITACHI, LTD., TOKIO/TOKYO, JP;HITACHI CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
ANDO, SETSUO, KAWASAKI-SHI, JP;USHIO, JIRO, YOKOHAMA-SHI, JP;INOUE, TAKASHI, YOKOHAMA-SHI, JP;OKUDAIRA, HIROAKI, TOTSUKA-KU, YOKOHAMA-SHI, JP;SHIMAZAKI, TAKESHI, HITACHI-SHI, JP;YOKONO, HITOSHI, FUJISAWA-SHI, JP |
