发明名称 DIGITAL ELECTROCHEMICAL ETCHING OF COMPOUND SEMICONDUCTORS
摘要 <p>A method for the digital electrochemical etching of semiconductors in an electrochemical flow cell system (10) in which alternating electrochemical potentials are applied between a reference electrode (12) and the compound semiconductors (22) sufficient to strip portions, preferably atomic layers, of the elements of the compound semiconductors from the compound semiconductors (22).</p>
申请公布号 WO1994028203(A1) 申请公布日期 1994.12.08
申请号 US1994006080 申请日期 1994.05.27
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