发明名称 Process for manufacturing metallized ceramic substrates.
摘要 <p>Metal is selectively etched from a substrate by: (i) applying an acrylic negative photoresist to the substrate, (ii) imaging and developing the photoresist, (iii) exposing the photoresist to actinic radiation of wavelength 200-310 nm or 2.4-8 microns, and (iv) contacting the photoresist-coated substrate with an etchant so as to remove portions of the metal not covered with photoresist.</p>
申请公布号 EP0627872(A2) 申请公布日期 1994.12.07
申请号 EP19940106324 申请日期 1994.04.22
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CYWAR, DOUGLAS;HESS,DON HERMAN;LALONDE, CHRISTIAN
分类号 H01L23/12;C23F1/00;C23F1/38;H01L21/48;H05K3/00;H05K3/06;H05K3/38;(IPC1-7):H05K3/06;G03F7/20 主分类号 H01L23/12
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