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经营范围
发明名称
Trench sidewall structure.
摘要
申请公布号
EP0591084(A3)
申请公布日期
1994.12.07
申请号
EP19930480127
申请日期
1993.09.10
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
RAJEEVAKUMAR, THEKKEMADATHIL
分类号
H01L21/76;H01L21/822;H01L21/8242;H01L27/04;H01L27/10;H01L27/108;H01L29/94;(IPC1-7):H01L21/82
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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