| 摘要 |
PROBLEM TO BE SOLVED: To provide heat treatment equipment capable of reducing the carrying time of the object to be treated while attaining the rationalization of the equipment.SOLUTION: Provided is heat treatment equipment provided with: a heating chamber 2 of performing heating to the object 8 to be treated; and a cooling chamber 1 of cooling the object 8 to be treated. The cooling chamber 1 is rotatable around a vertical shaft A, and is provided with a cooling part 1A of cooling the object 8 to be treated with a gas or a coolant and a delivery part 1B for receiving and carrying-out the object to be treated. A plurality of heating chambers 2 are arranged on the circumference coaxial with the vertical shaft A, the delivery part 1B and the heating chamber 2 can be connected air-tightly between the heating chamber 2 and the cooling chamber 1, and the space between the heating chamber 2 and the cooling part 1A is provided with a delivery apparatus 9 of capable of delivering the object 8 to be treated.SELECTED DRAWING: Figure 14 |
