| 摘要 |
PURPOSE:To prevent effectively a nozzle from making rotational deviation by improving a property of the nozzle following up a nozzle shaft. CONSTITUTION:A housing member 14 provided with an inserting path 20 communicating to a negative pressure supply path 18 is forced into the lower end of a nozzle shaft 12 and a nozzle 16 is removably inserted in the inserting path 20. While a first ring holding groove 26 is formed on the wall surface of the inserting path 20 of the housing member 14 along the circumferential direction, an O-ring 30 made of a rubber material is disposed in the first ring holding groove 26 and the negative pressure supply path 18 of the nozzle shaft 12 and the first ring holding groove 26 are constituted to communicate to each other through a gap in a close contact portion between a flange 22 and the nozzle 16 under the condition of the nozzle 16 inserted in the inserting path 20. |
