MANUFACTURE OF MULTILAYER SUBSTRATE

摘要

PURPOSE:To provide a manufacturing method of a multilayer substrate having stable capacity temperature characteristic even after diffusion of Ag element by estimating shift of capacity temperature characteristic which is produced by diffusion of Ag element to an insulation layer. CONSTITUTION:A multilayer substrate is manufactured by laminating a glass- ceramic insulation material which is formed to insulation layers 1a to 1e and an Ag inside wiring which is formed to inside wiring patterns 2... and by baking them integrally at a temperature not exceeding a melting point of an Ag conductor. In the manufacturing method of the multilayer substrate, a capacity temperature coefficient of an insulation sheet is made -240 to 20ppm/ deg.C so that a capacity temperature coefficient of the insulation layers 1a to 1e after baked is in a range of -40 to 40ppm/ deg.C.