发明名称 |
Scanning probe microscopy |
摘要 |
There is provided a scanning probe microscopy comprising a probe 6 situated to face the surface of an sample 1, a first piezoelectric element 8 for moving the sample 1 and the probe 6 relative to each other in a first direction perpendicular to the surface of the sample, and second and third piezoelectric elements 3 and 4 for moving the probe and the sample relative to each other in second and third directions perpendicular to the first direction, thereby enabling the probe to scan the surface of the sample, wherein at least one of the first to third piezoelectric elements 8, 3 and 4, which is closest to the sample 1, is formed of a single crystal.
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申请公布号 |
US5371365(A) |
申请公布日期 |
1994.12.06 |
申请号 |
US19930011906 |
申请日期 |
1993.02.01 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
WATANABE, MIYOKO;MIZUSHIMA, KOICHI;ONO, TOMIO;KOBAYASHI, TSUYOSHI;ITOH, SATOSHI |
分类号 |
G01B7/34;G01B21/30;G01Q10/02;G01Q10/04;G01Q30/10;G01Q60/16;G01Q70/04;G01Q70/14;G01Q70/16;H01J37/252;H01L41/18;(IPC1-7):H01J37/252 |
主分类号 |
G01B7/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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