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发明名称
RESIN COATING APPARATUS
摘要
申请公布号
JPH06338528(A)
申请公布日期
1994.12.06
申请号
JP19930128679
申请日期
1993.05.31
申请人
NEC KANSAI LTD
发明人
IMAI SHIGERU
分类号
H01L21/56;(IPC1-7):H01L21/56
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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