METHOD AND DEVICE FOR INSPECTING ELECTRICAL CHARACTERISTIC OF SEMICONDUCTOR STORAGE DEVICE

摘要

PURPOSE:To simultaneously test numerous pieces of EEPROMs by inhibiting writing operations against cells to be inspected for which it has been verified that data writing has been executed normally. CONSTITUTION:An ALPG 23 simultaneously executes data writing verifying inspections on the cells of a plurality of EEPROM devices 2. A comparator 24 compares an expected value signal from the ALPG 23 with the output signal from one cell to be inspected and discriminates that the cell is normal when both signals are coincident or defective when both signals are not coincident. A retry counter 25 counts the current number of retrying times based on the discriminated result of the comparator 24 and compares the count value with the compared value. A chip enable(CE) control circuit 27, the output terminal of which is simultaneously connected to the cells of the EEPROM 2 and input terminal of which is connected to the output terminal of the comparator 24, inhibits writing to the cells for which it has been verified that data writing has been executed normally at the retrying time.