| 摘要 |
PURPOSE:To form a fine pattern by using a half tone light shielding body and also to effectively utilize an exposed area by providing a light shielding area by means of a nearly perfect light shielding body around an area where the pattern is formed by the half tone light shielding body. CONSTITUTION:An irradiation range 4 including the exposed area 1 and extending over the light shielding area 2 is illuminated with illuminating light 3. In such a case, the irradiation range 4 is made larger than the exposed area 1, while the outside of the area 2 beginning from the boundary of the exposed area 1 is kept larger than the range 4. Therefore, in the case of performing projection and exposure by using the original drawing board for exposure by a projection and exposure device, an area to be exposed corresponding to the area 1 is irradiated with an exposing light beam but an area corresponding to the area 2 is not irradiated with the exposing light beam on a board to be exposed. That is, even when the area to be exposed on the board corresponding to the area 1 is made close to a position where the areas to be exposed are not superposed, a multiply exposed area is not found. |
