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发明名称
MEASURING METHOD FOR PROBE-TO-PROBE ERROR IN X-Y CIRCUIT SUBSTRATE INSPECTION DEVICE
摘要
申请公布号
JPH06331653(A)
申请公布日期
1994.12.02
申请号
JP19930145780
申请日期
1993.05.25
申请人
HIOKI EE CORP
发明人
TANAKA YUJI
分类号
G01R1/06;G01R31/28;(IPC1-7):G01R1/06
主分类号
G01R1/06
代理机构
代理人
主权项
地址
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