| 摘要 |
PURPOSE:To simplify the manufacturing process by punching a piezoelectric/ electrostrictive ceramic green sheet to form elongated slits longer than the width of inner electrode, in zigzags, within an area having dimensions two times as large as those of an unit element. CONSTITUTION:An inner electrode 3 is formed on a green sheet 1 and elongated slits 10 longer than the width of the inner electrode are made, in zigzags, within an area having dimensions two times as large as those of an unit element. The actuator element is manufactured by laminating the green sheets 1 while varying the direction alternately by 180 deg. within a plane. The laminate is then pressed to be integrated and fired and then it is cut along a dot line 13 to produce a laminate where the inner electrodes 3 and gaps having width half that of the slit 10 appear alternately on the side face. The side face is then metallized to form an outer electrode 4 thus completing an actuator element. |
