| 摘要 |
PURPOSE:To improve processing efficiency and to eradicate erroneous work by automatizing the producing and the inspecting processing of mask data. CONSTITUTION:An operator inputs the selecting and processing procedure of mask producing specifications by using an input device 1. A computer 3 reads the information of the mask producing specifications from a data file 2 according to the mask producing specifications and the processing procedure so as to execute the processing. The progressing state of the processing is outputted to a state information file 6 where state information is written. Besides, the file 6 is read and an executing state report is displayed on a display device 7 by the computer 3. When complicated judgement is specially required, the operator is urged to execute a countermeasure. When only simple reexecution is required. it is automatically judged by the computer 3 and the concerned processing is started again. Then, the serial processing can be set to the processing procedure together. Besides, even when one part of standard specification is different or not conforming to standard, processing condition data which is produced once can be shared by the respective processing operation. |
