| 摘要 |
<p>PURPOSE:To perform a stable exposure processing and enhance the producibility in an aligner stepper for performing a photograph etching onto a semiconductor wafer in a semiconductor step. CONSTITUTION:For example, a vacuum hole 12 is formed centering a stage holder 11 and vacuum grooves 13a to 13e are concentrically provided on a surface of the holder 11 centering the vacuum hole 12. The vacuum grooves 13a to 13e are connected with the vacuum hole 12 via a communicating vacuum groove 14. Also, a pin hole 16 is provided between the vacuum grooves 13a and 13b so as to hold clearance against a center up/down pin 15. The space between this pin hole 16 and the pin 15 is sealed with a sealing ring, whereby the leak amount of the open air from the pin hole 16 is reduced and the reduction in an adsorption force is prevented.</p> |
