MANUFACTURE OF TEST BOARD AND ELECTRODE USED FOR THAT,申请号JP19930118131-传众专利搜索

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发明名称	MANUFACTURE OF TEST BOARD AND ELECTRODE USED FOR THAT
摘要
申请公布号	JPH06334007(A)	申请公布日期	1994.12.02
申请号	JP19930118131	申请日期	1993.05.20
申请人	HITACHI LTD	发明人	TAGUMA YUICHIRO
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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