WAFER CONTAINER WITH BUILT-IN ORIENTATION FLAT ADJUSTING MACHINE

摘要

PURPOSE:To improve wafer transfer efficiency. CONSTITUTION:A wafer 7 in a cassette 9 set on a stage 3 is contained in a stocker 5 being a wafer container and carried from the storage to a wafer disc 8 and mounted on the disc 8 by a transfer robot 4. The cassette 12 of the stocker 5 has a plurality of slots in such a manner as to face each other, and moves up and down by an elevator mechanism. An orientation flat aligning machine 26 for the wafer is installed in a space between the slots. The wafer transferred into the slot by the transfer robot is placed on the rotary table 28 of the aligning machine, the orientation flat is aligned in a predetermined angular position by the reflecting photoelectric sensor of a sensor installation part 29, and the wafer is mounted and contained in the slot. Thus, the waiting time for the transfer robot during the orientation flat adjustment is eliminated.